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Filter Recommendation by Application



                                                                                     Filter	Family
           Application                   Chemicals
                                                                          Primary	Choice        Secondary	Choice
                                  Si.etch         HF/HNO3/acetic.acid        Chemflow                 Proflow
                                 SiO2.etch        BOE/BHF-HF/NH4F            Clariflow               Fluoroflow
              Etching
                                Si3N4.etch             H3PO4                 Fluorocap             Fluoroflow.XF
                                  AI.etch       H3PO4/HNO3/acetic.acid       Fluoroflow
                                                                         Chemflow.(<60°C),..     Proflow-E.(<60°C).
                            Hydroxy/amine.based  NMP,.glycol.amine,.etc.
                                                                         Fluoroflow.(>60°C)      Fluoroflow.(>60°C)
              Residue.                                                   Chemflow.(<60°C),..     Proflow-E.(<60°C).
              Removal        Glycol/NH4F.based       Glycol,.NH4F        Fluoroflow.(>60°C)      Fluoroflow.(>60°C)
                                                    DMSO/amine,..         Proflow.(<60°C),..    Chemflow-E.(<60°C).
                             DMSO/amine.based
                                                   EL/2.pentamone        Fluoroflow.(>60°C)      Fluoroflow.(>60°C)
                                  Pirahha            H2SO4/H2O2              Fluorocap             Fluoroflow.XF
              Cleaning             SC            NH4OH/H2O2/H2O             Fluoroflow
                                   SC2              HCI/H2O2/H2O             Fluoroflow
                                                 Metal.compound/acid..    Clariflow.(<60°C),.    Polyflow.M.(<60°C).
                               Cu,.Ni,.Au,.etc.
                                                    or.base/buffer       Fluoroflow.(>60°C)      Fluoroflow.(>60°C)
                                                 Photo.sensitive.agent/.
                                Photoresist                                  Polyflow.M              Chemflow
                                                     polymer.resin
           Photochemical.                                                  Chemflow.PE
              Filtration
                                Developing                                   Fluoroflow
                                                                              Proflow
                                  Oxide                                      Polyflow.G
               CMP
                                  Copper                                     Polyflow.G
                                                                          Clariflow.(<60°C),..
                DI                Rinsing               H2O
                                                                         Fluoroflow.(>60°C)
            Ozonatde.DI           Rinsing              H2O/O3                Fluoroflow


        SELECT                               Ultraclean                           SELECT-Pleating
        Pleating	Technology                  Leads	the	Microelectronics
        Bath.recovery.rate.is.related.to.a.  Industry	in	Cleanliness
        filter’s.flow.capacity..However,.space.  To.improve.product.quality.and..
        availability.in.process.baths.is.limited,.  yield,.our.R&D.and.design.teams.
        thus.there.is.always.a.constant..    have.successfully.developed.the.                              guard
        challenge.to.increase.the.surface.   revolutionary.Ultraclean.cleaning.          core
        area.and.the.flow.capacity.of.the.filter.  process..This.proprietary.process.is.
        without.increasing.its.size.         applied.to.electronics.grade.products.
                                             to.provide.a.total.metals.extractables
        Our.revolutionary.SELECT.pleating.   level.of.<5ppb.
        utilizes.an.innovative.pleat-design.
        that.not.only.increases.the.effec-   Ultraclean’s.low.levels.of.metals..                    standard pleating
        tive.filtration.area,.but.also.greatly.  extractables.provide.users.with.a.
        increases.the.flow-rate.as.compared.  highly.consistent.manufacturing.
        to.conventional.types.of.pleating..  process.–.and.thus.very.low.product.
        SELECT.pleating.effectively.offers.  reject.rates.
        up.to.80%.more.filtration.area,.which.
        translates.into.twice.the.flow.capacity..
        Bath.recovery.can.thus.be.significant-
        ly.improved.and.costs.lowered.                              ENGINEERING.YOUR.SUCCESS.
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