Page 46 - ASME IMECE 2018 Program

TRACK PLENARY
resulted in a significant reduction in long-term drift in our
silicon-on-insulator mode-symmetric vibratory-rate gyroscope.
In the second example, pushing the state-of-the-art in dynamic
range in a CMOS-MEMS high-g shock sensor presents
challenges met by maturation of a system-on-chip design
comprising an array of hundreds of individual accelerometer
cells and augmented by piezoFET die-level stress sensors.
Bio: Gary K. Fedder is the Howard M. Wilkoff WSe2 and MoSe2, as well as their heterostructures. We
Professor of Electrical and Computer
Engineering, Professor of The Robotics
Institute, and Vice Provost for Research at
Carnegie Mellon University. He previously
served in administrative roles at Carnegie
Mellon as Director of the Institute for Complex Engineered
Systems (2006–2014) and Associate Dean for Research in the
College of Engineering (2013–2015). From 2011 to 2012, Dr.
Fedder served as a technical co-lead in the U.S. Advanced
Manufacturing Partnership where he worked with industry,
academia, and government to generate recommendations
that motivated the launch of the National Network for
Manufacturing Innovation, now called Manufacturing USA.
He was founding president and later served as interim CEO
of the Advanced Robotics for Manufacturing Institute in 2017.
Dr. Fedder received his B.S. and M.S. in EECS from MIT in
1982 and 1984, respectively, and his Ph.D. in EECS from the
University of California at Berkeley in 1994. He worked at
Hewlett-Packard as an R&D engineer from 1984 to 1989.
His personal research lies in design and process integration
of MEMS where he has contributed to over 280 research
publications and holds 15 patents. He is an IEEE Fellow for
contributions to integrated MEMS. He served as subject editor
for the IEEE Journal of Microelectromechanical Systems
from 2002 to 2013 and currently serves on the executive
editorial board for the IoP Journal of Micromechanics and
Microengineering, as a member of the editorial board for the
IET Micro & Nano Letters, and as co-editor of the Wiley-VCH
Advanced Micro- and Nanosystems book series.
Track 13: Micro- and Nano-Systems
Engineering and Packaging
13-2-2 MICRO- AND NANO-SYSTEMS ENGINEERING
AND PACKAGING PLENARY II
Thursday, November 15, 8:00am–8:45am
Room 303, David L. Lawrence Convention Center
2D Materials, Flexible Electrodes and Surfaces
(IMECE2018-90107)
Eui-Hyeok Yang
Stevens Institute of Technology, USA
Abstract: There has been a growing interest in two dimensional
(2D) crystals beyond graphene, exhibiting novel properties
and potential applications in next generation electronic and
photonic devices. Graphene has superior properties, including
high carrier mobility, ultrahigh surface area and excellent
thermal conductivity. Whereas the lack of a band gap is a
xliv critical limitation for the use of graphene in electronic devices,
monolayer semiconducting transition metal dichalcogenides
(TMDs) have shown highly promising prospects in electronics
and optoelectronics. Therefore, non-graphene 2D atomic
layers, such as hexagonal boron nitride (hBN) and TMDs, have
been integrated into research scale devices, thereby probing
mechanical, chemical, electrical and optoelectrical functions.
I will present our investigation of chemical vapour deposition
(CVD)-growth, achieving localized, patterned, single crystalline
or polycrystalline monolayers of TMDs, including MoS2, WS2,
particularly focus on enabling the fabrication of epitaxially
grown TMDs on other van der Waals materials towards
synthesizing TMDs with an ultralow-defect density. We perform
microscopic and macroscopic material characterization to
provide predictive strategies for TMD growth and in turn,
illuminate the role of dissimilar 2D substrates in the prevention
of interior defects in TMDs. We furthermore demonstrate the
growth of TMD homobilayers with well-ordered stacking angles
by controlling edge structures of the underlying TMD layer.
Other related projects include modelling to prevent the
anomalies encountered in topographic images of TMD
monolayers in dynamic atomic force microscopy, and
elucidating the effect of TMD surfaces and their geometric
arrangements on cellular morphology and adhesion. We also
investigate other nanomaterials, including vertically aligned
carbon nanotubes for stretchable supercapacitors. Building on
these results, our next step is to combine 2D materials with
flexible substrates toward next generation wearable devices.
Currently my group is collaborating with many top research
groups in the US and around the world.
Biography: Eui-Hyeok Yang is a full professor
in the Mechanical Engineering Department at
Stevens Institute of Technology. He received
his Ph.D. from Ajou University, Korea. After his
postdoctoral training at University of Tokyo
and at California Institute of Technology, he
joined NASA’s Jet Propulsion Laboratory (JPL), where he
became a Senior Member of the Engineering Staff. In
recognition of his excellence in advancing the use of MEMS-
based actuators for NASA’s space applications, he received
the prestigious Lew Allen Award for Excellence at JPL in 2003.
He joined Stevens Institute of Technology as an Associate
Professor in the Department of Mechanical Engineering in
2006, established the Multi-User Micro Device Laboratory at
Stevens in 2008, and became a tenured full Professor in
Mechanical Engineering in 2014. Currently, his group’s research
covers the growth and nanofabrication of graphene, carbon
nanotubes and TMD heterostructures, as well as the
implementation of tunable wetting and surface interaction. He
has received more than 35 major grants over the course of his
career from several federal agencies, including six NSF and
three AFOSR grants, and five NASA and three NRO contracts.
Dr. Yang’s service to the professional community includes
formal appointments, such as Editorial Board Member of
Nature’s Scientific Reports, Associate Editor of IEEE Sensors
Journal, and Editorial Board Member of the Elsevier journal,
Nano-Structures & Nano-Objects. Dr. Yang has published
hundreds of articles, books, and papers, as well as provided
keynotes, presentations, and seminars at various academic
and industrial events.