Page 9 - Industrial Technology EXTRA 1st March 2021

The design of semiconductor
process equipment is extremely
challenging in terms of both
component specifications and the
precision of measurement and
control systems. Manufacturing
equipment must also be price
competitive whilst meeting the
demands of the latest chip
innovations such as the 10 nm
and 7 nm MOSFET technology
nodes.
Mr Sun Guohua, president of U-Precision, manufacturing cycle times. U-Precision develops
explains: “U-Precision has been involved in the products for demanding semiconductor processes
development of wafer stages for photolithography such as wafer bonding, which requires high-
since it was founded. We are currently the only precision motion control in order to accurately
Chinese company, and only the second company control the gaps between wafers.
globally, to master the essential technology for dual
wafer stages. Solution
“The wafer stage is one of the two main The diversity, reliability and specifications of
components of a photolithography system [the other Renishaw's optical encoders meet the demands of
being EUV exposure systems], and the associated the semiconductor industry and are an ideal fit for
technology is extremely demanding in terms of U-Precision's motion control products.
motion control. We have developed our own U-Precision standard motion stages can be
technology in key areas including planar air configured with up to seven motion axes that
floatation, planar magnetic levitation, and magnetic feature linear positioning accuracy as high as 0.5
levitation-based micro-positioners with six degrees µm and bi-repeatability up to 0.1 µm. The company
of freedom. We provide a complete range of motion also offers custom designs for customer processes
stage products from high-value photolithography upon request.
wafer stages to custom solutions. U-Precision stages are driven by linear motors
“Our motion stages were well positioned for that use position feedback from high-performance
advanced semiconductor applications from the encoders such as Renishaw's nanometre-resolution
moment they entered the market. Compared to TONiC series with Ti interface. The advanced design
motion stage products of similar quality from of these stages makes them suitable not only for use
overseas manufacturers, ours are highly price in semiconductor manufacturing applications, but
competitive.” also in other industry sectors such as flat-panel
High levels of customisation and overall displays, glass and glass cutting, and 3D imaging.
equipment efficiency are important for U-Precision's other whole-process products include
semiconductor manufacturing. Equipment manu- wafer bonding equipment and advanced laser
facturers must also deal with stringent process annealing equipment, all of which employ
requirements and the drive for ever-shorter Renishaw optical encoder systems.

March 2021 • INDUSTRIAL TECHNOLOGY EXTRA • p9