Page 3 - UHP catalog_2022
P. 3
MAJOR APPLICATION : GAS PANEL CONTROL
As a part of semiconductor process, the gas panel controls the flow of gas into the process chamber. Pressure
transducers are installed inside of the gas panel on each of the gas sticks to monitor the pressure output of the
pressure regulator. This position enables them to send signals that adjust system operation with greater precision,
accuracy, and speed, resulting in better overall system function.
