Page 10 - IchorSMACatalog

MFR - XX - X - X - X - X - X

Base Size

Seal Type

Number of Ports
Configuration

Material

Purity
• For material and purity level see page 6.

BASE SEAL NUMBER CONFIGURATION ORDERING
SIZE TYPE OF PORTS (ORIFICE PORT) NUMBER

Side MFR-18-1-2-1-X-X
2-Ports
Center MFR-18-1-2-2-X-X
C-Seal
Side MFR-18-1-3-1-X-X
3-Ports
1.125” Center MFR-18-1-3-2-X-X
2-Ports Side MFR-18-2-2-1-X-X
W-Seal Side MFR-18-2-3-1-X-X
3-Ports
Center MFR-18-2-3-2-X-X
Side MFR-24-1-2-1-X-X
2-Ports
Center MFR-24-1-2-2-X-X
C-Seal
Side MFR-24-1-3-1-X-X
3-Ports
1.500” Center MFR-24-1-3-2-X-X
2-Ports Side MFR-24-2-2-1-X-X
W-Seal Side MFR-24-2-3-1-X-X
3-Ports
Center MFR-24-2-3-2-X-X
Side MFR-24HF-1-2-1-X-X
2-Ports
Center MFR-24HF-1-2-2-X-X
1.500” HF C-Seal
Side MFR-24HF-1-3-1-X-X
3-Ports
Center MFR-24HF-1-3-2-X-X

Restrictor Ordering Instructions

• Please specify orifice diameter or the following: Gas Type, Flow Rate, Inlet Pressure, and Outlet
Pressure so Ichor may define the appropriate diameter.

• Orifice diameters .005” and larger are tested and certified to ± 5 % of rated flow. Orifice
diameters smaller than .005” may have a higher rated flow variation.
• Contact Ichor for assistance.

Features

• One piece construction minimizes contamination.
• Standard MFR interface allows for universal compatibility between top mount components and
TMS substrate so no additional length in gas system is required.

PAGE 10 | SMA: Surface Mount Accessories