Page 2 - IchorSMACatalog
P. 2
SMA: Surface Mount Accessories
Ichor provides a full line of TMS compatible accessories in both
surface mount and sandwich confi gurations. When you select
an Ichor TMS system, you can readily add accessories including:
Modular Top Cap (MTC), Mass Flow Controller Cap (MFC-CAP),
Modular Top Plug (MTP), Mass Flow Controller Plug (MFC-
PLUG), Modular Flow Restrictor (MFR) and Modular Component
Port(MCP). All of these accessories are manufactured in
accordance with SEMI specifi cations, providing outstanding
reliability and value for modular systems.
Take advantage of Ichor’s extensive experience machining exotic
materials to create accessories for all your application needs.
Ichor also can provide engineering support for your custom
product requirements and rapid prototyping capabilities to help
you keep your project moving forward.
PAGE 2 | SMA: Surface Mount Accessories
