Page 8 - Industrial Technology EXTRA 1st March 2021
P. 8
ENCODERS...
Precision measurement in
semiconductor manufacture
Beijing U-Precision is a leading manufacturer of equipment for high-precision
industrial processes. Its advanced semiconductor equipment and motion stages
use Renishaw's high-performance TONiC optical encoder systems.
emiconductor demand has grown ing includes dual wafer stages for photolithography,
continually in recent years due to the rapid wafer bonding equipment, advanced laser annealing
development of new technologies such as equipment, and equipment front-end modules.
Sartificial intelligence (AI), 5G broadband Beijing U-Precision’s products are primarily
networks, and Internet of Things (IoT). Equipment aimed at the semiconductor and precision
manufacturers have gradually stepped up invest- manufacturing industries and include both whole
ment in the development of new models to cope units and major mechanical measurement and
with the formidable challenges posed by high- control components, but motion stages account for
precision advanced manufacturing processes. Key approximately two thirds of the company’s overall
process equipment for semiconductor manufactur- revenue.
March 2021 • INDUSTRIAL TECHNOLOGY EXTRA • p8
