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Microfiltration Products


        Engineered for Microelectronic Applications



                                                       Filter	   SELECT*
                                        Available
          Product	line                                Ratings      and	    Typical	Applications
                                      Configurations
                                                     (microns) Ultraclean
          FLUOROFLOW  ®                     .         0.03,.0.05,.         •...Critical.filtration.of.aggressive.acids,.
          00%.Fluoropolymer.Construction  Cartridge   0.,.0.2,.  S U XF    bases,.strippers,.and.solvents
                                                       0.45,.   XL        •..Available.for.high.temperature.applications

          FLUOROCAP  ®                                    .                •...Encapsulated.filter.for.critical.filtration.of..
          00%.Fluoropolymer.Construction.  .         0.03,.0.05,.  S U  XF  aggressive.chemicals.and.process.
          Capsules                        Capsule      0.,.0.2              fluids.under.harsh.conditions.where.the.
                                                                 XL          introduction.of.contamination.during.
                                                                             cartridge.change.out.is.a.concern
                                                                           •..Available.for.high.temperature.applications

                    ®
          CHEMFLOW .PE.&.XF                               .                •...Purification.of.photoresists,.chemicals.
          PTFE.Membrane./.High.Density.  Cartridge    0.03,.0.05,.  S  XF    and.etch.baths
          Polyethylene.Structure                      0.,.0.2,.          •..Filtration.of.solvents,.cleaning.solutions

          CLARIFLOW ®                    Cartridge.   0.02,.0.04,.         •...Aqueous.based.chemicals;.recirculating.
          Polyethersulfone.(PES).Membrane./.  Mini-Capsule.  0.,.0.2,.  S   etch.baths;.UPW.systems
          Mini.Polypropylene.Structure  Mini-Cartridge  0.45,.0.65,.
                                                         0.8
          PROFLOW.II ®                   Cartridge.                        •...Ultrapure.chemicals.and.gas..
          PTFE.Membrane./.Polypropylene./.  Mini-Capsule.  0.03,.0.05,.  S   processing;.photochemical.processing
          Mini.Structure                Mini-Cartridge  0.,.0.2,.         •..Bulk.chemical.distribution
                                                       0.45,.
          POLYFLOW .MEMBRANE                .         0.04,.0.07,.         •...Filtration.of.photochemicals.and..
                    ®
          Polypropylene.Nominal.Rated..  Cartridge     0.,.0.2  S           ultrapure.chemicals
          Membrane./.Polypropylene.Structure                               •..Gas.filtration

          POLYFLOW  ®                    Cartridge.  0.6,..2,.2.5,.       •..DI.water.prefiltration
          Polypropylene.Absolute.Rated.Depth.  Mini-Capsule.  5,.0,.20,.40  •..Solvent.and.gas.prefiltration
          Media./.Polypropylene.Structure  Mini-Cartridge                  •..General.filtration
          *Patent.pending


         S SELECT Technology  U Ultraclean Technology  XF XF Technology  XL XL Technology




         S The.revolutionary.SELECT.technology.filter.  U Ultraclean.technology.leads.the.microelec-  XF XF.is.a.revolutionary.membrane..
            cartridges.can.improve.and.lower.the.costs.  tronics.industry.in.cleanliness..Ultraclean.is.  technology..It.provides.superior.flow.over.
            of.wafer.processing..Imagine:.up.to.80%.  a.proprietary.process.applied.to.electronics.  traditional.cartridges.by.utilizing.an.asym-
            more.effective.filtration.area.–.with.twice.  grade.products..It.provides.a.total.metals.  metric.PTFE.membrane..XF.cartridges.
            the.throughput..All.of.this.with.a.particle.  extractables.level.of.<5ppb..Ultraclean’s.  offer.up.to.three.times.the.flow.rate.and.
            retention.of.>99.99%.from.a.product.that.is.  low.level.of.metals.extractables.provides.  throughput.at.lower.differential.pressure.
            cleanroom.manufactured.and.tested.  users.with.a.highly.consistent.manufactur-
                                                ing.process.and.very.low.product.reject.
                                                rates.
         XL XL.technology.provides.maximum.flow.rate.
            and.lifetime..It.combines.SELECT.technol-
            ogy.with.a.larger.diameter.cartridge.(3.25").
            for.the.highest.flows.in.the.industry.



          Parker.Hannifin.Corporation.is.committed.to.provide.the.highest.quality.product.to.our.customers..To.this.end,.our.ISO.900:2000.
          certified.Quality.System.ensures.that.this.occurs..At.Parker.Hannifin.Corporation,.we.do.our.best.to.resolve.all.quality.issues.in.a.quick.
          and.timely.manner..In.addition,.we.strive.to.eliminate.problems.before.they.are.seen..By.taking.this.continuously.proactive.approach.to.
          the.quality.of.all.of.our.products,.Parker.Hannifin.Corporation.has.the.best.product.on.the.market.at.all.times.
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