Page 15 - PCMI Journal December 2021

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Pre-Treatment – Preparation of Metal Surface
Sean Hill, Product Manager, Eternal Technology Corporation
Pre-Treatment – Preparation of Metal Surface
PCMI Conference September 2, 2020 Sean Hill
8/31/21
Pre-Treatment
• Pre-Treatment Plays a Critical Role in Photo Chemical Milling.
• Some CM shops are more constrains in Pre-treatment than others. • Use and availability of chemical and mechanical surface treatments.
• Overall throughput in Reel-to-Reel Operations.
• Need to maintain substrate appearance.
• Harsh post develop (etch) environment.
• Priorities for Pre-treatment control:
• Photolithographic: Adhesion, Resolution, Linewidth Reproduction, Sidewall. • Post Develop Integrity: Substrate surface protection through etch.
• Understand and Achieve Optimum Performance through Pre- Treatment, Surface preparation process control.
Issue 138 December 2021 PCMI Journal 15
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