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Hardware & Accessories
The TMS product line can be readily adopted for a variety of uses with the help of hardware speci cally
made to support the modular system installation. Among the items Ichor o ers are bolts, tools, heaters,
thermocouples, base plates and ceramic insulators. Custom hardware solutions are also available for your
speci c application needs – contact Ichor for more information.
Base Plates
Features...................................................................................................................................................................page 3
Bolts
Features...................................................................................................................................................................page 4
Speci cations .......................................................................................................................................................page 4
Bolts Ordering Number ...................................................................................................................................page 5
Heaters | TC | Ceramics
Features...................................................................................................................................................................page 6
Ceramic Insulators .............................................................................................................................................page 6
Heaters and Heaters Ordering Numbers ................................................................................................page 7
Thermocouples and Thermocouples Ordering Numbers ...............................................................page 8
Tools
Features...................................................................................................................................................................page 9
Tools Ordering Numbers .................................................................................................................................page 9
PAGE 2 | Hardware & Accessories
