Page 6 - IchorHardwareCatalog

Heaters | TC | Ceramics Set Screw: 02-10-0011

Features

Many gas and liquid delivery applications require
heating for optimal performance. To allow TMS
systems to be heated, Ichor o ers an array of
hardware options that are easily assembled onto
the platform. Heaters and thermocouples can be
quickly assembled via dogpoint setscrews within
the cradles. Custom ceramic insulation solutions
can be used to thermally isolate a heated section
from the rest of the TMS system.
Contact Ichor for your
thermal control requirements. TC: 02-10-0507
02-10-0508

Ceramic:
Custom Solutions
Heater: 02-10-0502-XX
Ceramic Insulators

For heated TMS systems, ceramic insulators help serve as thermal barriers between the heated
components and the rest of the system. Easy to install, they are recessed within the baseplate to allow
the cradles to remain ush with each other. All ceramic insulators are custom solutions, so please
contact Ichor for assistance.

Features

• Material: Aluminum Silicate Ceramic
• Isolates thermal zone from areas not requiring heating

• Standard thickness: 1/8”
• Mounted between cradles and base plate

PAGE 6 | Hardware & Accessories: Heaters | TC | Ceramics