Page 8 - 2020-2021-Heroes-Program-Bklt-v1_fa_Neat
P. 8

ACS honors DuPont Electronics & Imaging for Chemical Mechanical Planarization (CMP), a key process
            in semiconductor fabrication, which supplies the advanced chips needed for smartphones, computing,

            the internet of things, vehicles and numerous industrial applications. The CMP process, enabled by
            DuPont’s CMP pads, has contributed to the success of semiconductor technology for well over 35 years.




                              Marty DeGroot
                              Marty DeGroot is R&D Director for DuPont Industrial Solutions. Marty has 15 years’ experience
                              in industrial materials innovation, including the fields of catalysis, solar cells/modules, and
                              chemical mechanical planarization technologies to enable advanced semiconductor nodes.
                              He has a Ph.D. in Chemistry, 30 granted U.S. patents and more than 25 publications.





                              Bainian Qian
                              Bainian Qian, a Technical Fellow at DuPont, was a key contributor to the development and
                              commercialization of the IkonicTM CMP pad product family. His work in the understanding of
                              polyurethane chemistry and polymer structure led to breakthroughs in product performance.
                              He holds 37 US patents.




                              MaryJo Kulp
                              Mary Jo Kulp was a Sr. Scientist at Dow/Rohm and Haas. Now retired, Kulp developed and
                              proved a polymeric hypothesis that resulted in the basis of the VisionPad™ CMP pad family.
                              Offerings from the VisionPad™ family played a critical enabling role for the introduction of
                              copper damascene integration.




                              David B. James
                              David James was a R&D Manager at Dow/Rohm and Haas. Now retired, he led a team that
                              demonstrated a lower modulus polyurethane polymer for better contact and an increase in
                              copper film removal rate. He also coordinated scale-up and manufacturing of the first offerings
                              in the VisionPad™ pad family.



      8     #HeroesofChemistry
   3   4   5   6   7   8   9   10   11   12   13