Page 313 - 2018_IFC

SEMICONDUCTOR FABRICATION FACILITIES

2703.2 Systems, equipment and processes. Systems, equip- 2703.4 Emergency plan. An emergency plan shall be estab-
ment and processes shall be in accordance with Sections lished as set forth in Section 403.7.1.
2703.2.1 through 2703.2.3.2.
2703.5 Maintenance of equipment, machinery and pro-
2703.2.1 Application. Systems, equipment and processes cesses. Maintenance of equipment, machinery and processes
shall include, but not be limited to, containers, cylinders, shall comply with Section 5003.2.6.
tanks, piping, tubing, valves and fittings. 2703.6 Security of areas. Areas shall be secured in accor-
2703.2.2 General requirements. In addition to the dance with Section 5003.9.2.
requirements in Section 2703.2, systems, equipment and 2703.7 Electrical wiring and equipment. Electrical wiring
processes shall comply with Section 5003.2, other applica- and equipment in HPM facilities shall comply with Sections
ble provisions of this code, the International Building 2703.7.1 through 2703.7.3.
Code and the International Mechanical Code.
2703.7.1 Fabrication areas. Electrical wiring and equip-
2703.2.3 Additional requirements for HPM supply pip- ment in fabrication areas shall comply with NFPA 70.
ing. In addition to the requirements in Section 2703.2, 2703.7.2 Workstations. Electrical equipment and devices
HPM supply piping and tubing for HPM gases and liquids within 5 feet (1524 mm) of workstations in which flamma-
shall comply with this section.
ble or pyrophoric gases or flammable liquids are used shall
2703.2.3.1 General requirements. The requirements comply with NFPA 70 for Class I, Division 2 hazardous
set forth in Section 5003.2.2.2 shall apply to supply locations. Workstations shall not be energized without
piping and tubing for HPM gases and liquids. adequate exhaust ventilation in accordance with Section
2703.14.
2703.2.3.2 Health-hazard ranking 3 or 4 HPM. Sup-
ply piping and tubing for HPM gases and liquids hav- Exception: Class I, Division 2 hazardous electrical
ing a health-hazard ranking of 3 or 4 shall be welded equipment is not required where the air removal from
throughout, except for connections located within a the workstation or dilution will prevent the accumula-
ventilation enclosure if the material is a gas, or an tion of flammable vapors and fumes on a continuous
approved method of drainage or containment provided basis.
for connections if the material is a liquid. 2703.7.3 Hazardous production material (HPM)
2703.3 Construction requirements. Construction of semi- rooms, gas rooms and liquid storage rooms. Electrical
conductor fabrication facilities shall be in accordance with wiring and equipment in HPM rooms, gas rooms and liq-
Sections 2703.3.1 through 2703.3.9. uid storage rooms shall comply with NFPA 70.
2703.8 Corridors and enclosures for stairways and ramps.
2703.3.1 Fabrication areas. Construction and location of
fabrication areas shall comply with the International Hazardous materials shall not be used or stored in corridors
Building Code. or enclosures for stairways and ramps.
2703.9 Service corridors. Hazardous materials shall not be
2703.3.2 Pass-throughs in exit access corridors. Pass- used in an open-system use condition in service corridors.
throughs in exit access corridors shall be constructed in
accordance with the International Building Code. 2703.10 Automatic sprinkler system. An approved auto-
matic sprinkler system shall be provided in accordance with
2703.3.3 Liquid storage rooms. Liquid storage rooms Sections 2703.10.1 through 2703.10.5 and Chapter 9.
shall comply with Chapter 57 and the International Build-
ing Code. 2703.10.1 Workstations and tools. The design of the
sprinkler system in the area shall take into consideration
2703.3.4 HPM rooms. HPM rooms shall comply with the the spray pattern and the effect on the equipment.
International Building Code.
2703.10.1.1 Combustible workstations. A sprinkler
2703.3.5 Gas cabinets. Gas cabinets shall comply with head shall be installed within each branch exhaust con-
Section 5003.8.6. nection or individual plenums of workstations of com-
2703.3.6 Exhausted enclosures. Exhausted enclosures bustible construction. The sprinkler head in the exhaust
shall comply with Section 5003.8.5. connection or plenum shall be located not more than 2
feet (610 mm) from the point of the duct connection or
2703.3.7 Gas rooms. Gas rooms shall comply with Sec- the connection to the plenum. Where necessary to pre-
tion 5003.8.4. vent corrosion, the sprinkler head and connecting pip-
2703.3.8 Service corridors. Service corridors shall com- ing in the duct shall be coated with approved or listed
ply with Section 2705.3 and the International Building corrosion-resistant materials. Access to the sprinkler
Code. head shall be provided for periodic inspection.
Exceptions:
2703.3.9 Cabinets containing pyrophoric liquids or
water-reactive Class 3 liquids. Cabinets in fabrication 1. Approved alternative automatic fire-extin-
areas containing pyrophoric liquids or Class 3 water-reac- guishing systems are allowed. Activation of
1
tive liquids in containers or in amounts greater than / gal- such systems shall deactivate the related pro-
2
lon (2 L) shall comply with Section 2705.2.3.4. cessing equipment.

280 2018 INTERNATIONAL FIRE CODE ®
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