Page 315 - 2018_IFC

SEMICONDUCTOR FABRICATION FACILITIES

through 2703.12.3, Section 5004.9 and Section 5005.4.4. The 2703.13.2 Gas detection system operation. The gas
maximum allowable quantity per control area provisions of detection system shall be capable of monitoring the room,
Section 5004.1 shall not apply to emergency alarm systems area or equipment in which the HPM gas is located at or
required for HPM. below all the following gas concentrations:
2703.12.1 Where required. Emergency alarm systems 1. Immediately dangerous to life and health (IDLH)
shall be provided in the areas indicated in Sections values where the monitoring point is within an
2703.12.1.1 through 2703.12.1.3. exhausted enclosure, ventilated enclosure or gas
2703.12.1.1 Service corridors. An approved emer- cabinet.
gency alarm system shall be provided in service corri- 2. Permissible exposure limit (PEL) levels where the
dors, with not less than one alarm device in the service monitoring point is in an area outside an exhausted
corridor. enclosure, ventilated enclosure or gas cabinet.
2703.12.1.2 Corridors and interior exit stairways 3. For flammable gases, the monitoring detection
and ramps. Emergency alarms for corridors, interior threshold level shall be vapor concentrations in
exit stairways and ramps and exit passageways shall excess of 25 percent of the lower flammable limit
comply with Section 5005.4.4. (LFL) where the monitoring is within or outside an
exhausted enclosure, ventilated enclosure or gas
2703.12.1.3 Liquid storage rooms, HPM rooms and
gas rooms. Emergency alarms for liquid storage cabinet.
rooms, HPM rooms and gas rooms shall comply with 4. Except as noted in this section, monitoring for
Section 5004.9. highly toxic and toxic gases shall also comply with
2703.12.2 Alarm-initiating devices. An approved emer- Chapter 60.
gency telephone system, local alarm manual pull stations, 2703.13.2.1 Alarms. The gas detection system shall
or other approved alarm-initiating devices are allowed to initiate a local alarm and transmit a signal to the emer-
be used as emergency alarm-initiating devices. gency control station when a short-term hazard condi-
2703.12.3 Alarm signals. Activation of the emergency tion is detected. The alarm shall be both visible and
alarm system shall sound a local alarm and transmit a sig- audible and shall provide warning both inside and out-
nal to the emergency control station. side the area where the gas is detected. The audible
alarm shall be distinct from all other alarms.
2703.13 Gas detection systems. A gas detection system
complying with Section 916 shall be provided for HPM gases 2703.13.2.2 Shut off of gas supply. The gas detection
where the physiological warning threshold level of the gas is system shall automatically close the shutoff valve at the
at a higher level than the accepted permissible exposure limit source on gas supply piping and tubing related to the
(PEL) for the gas and for flammable gases in accordance with system being monitored for which gas is detected when
Sections 2703.13.1 through 2703.13.2.2. a short-term hazard condition is detected. Automatic
closure of shutoff valves shall comply with the follow-
2703.13.1 Where required. A gas detection system shall ing:
be provided in the areas identified in Sections 2703.13.1.1
through 2703.13.1.4. 1. Where the gas-detection sampling point initiating
the gas detection system alarm is within a gas
2703.13.1.1 Fabrication areas. A gas detection system cabinet or exhausted enclosure, the shutoff valve
shall be provided in fabrication areas where HPM gas in the gas cabinet or exhausted enclosure for the
is used in the fabrication area.
specific gas detected shall automatically close.
2703.13.1.2 HPM rooms. A gas detection system shall 2. Where the gas-detection sampling point initiating
be provided in HPM rooms where HPM gas is used in the gas detection system alarm is within a room
the room.
and compressed gas containers are not in gas cab-
2703.13.1.3 Gas cabinets, exhausted enclosures and inets or exhausted enclosure, the shutoff valves
gas rooms. A gas detection system shall be provided in on all gas lines for the specific gas detected shall
gas cabinets and exhausted enclosures for HPM gas. A automatically close.
gas detection system shall be provided in gas rooms 3. Where the gas-detection sampling point initiating
where HPM gases are not located in gas cabinets or the gas detection system alarm is within a piping
exhausted enclosures.
distribution manifold enclosure, the shutoff valve
2703.13.1.4 Corridors. Where HPM gases are trans- supplying the manifold for the compressed gas
ported in piping placed within the space defined by the container of the specific gas detected shall auto-
walls of a corridor and the floor or roof above the cor- matically close.
ridor, a gas detection system shall be provided where
Exception: Where the gas-detection sampling point
piping is located and in the corridor. initiating the gas detection system alarm is at the use
Exception: A gas detection system is not required location or within a gas valve enclosure of a branch
for occasional transverse crossings of the corridors line downstream of a piping distribution manifold,
by supply piping that is enclosed in a ferrous pipe or the shutoff valve for the branch line located in the
tube for the width of the corridor.

282 2018 INTERNATIONAL FIRE CODE ®
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