Page 10 - Parker - Microfiltration products for the microelectronics industry

Microfiltration Products

Engineered for Microelectronic Applications

Filter SELECT*
Available
Product line Ratings and Typical Applications
Configurations
(microns) Ultraclean
FLUOROFLOW ® . 0.03,.0.05,. •...Critical.filtration.of.aggressive.acids,.
00%.Fluoropolymer.Construction Cartridge 0.,.0.2,. S U XF bases,.strippers,.and.solvents
0.45,. XL •..Available.for.high.temperature.applications

FLUOROCAP ® . •...Encapsulated.filter.for.critical.filtration.of..
00%.Fluoropolymer.Construction. . 0.03,.0.05,. S U XF aggressive.chemicals.and.process.
Capsules Capsule 0.,.0.2 fluids.under.harsh.conditions.where.the.
XL introduction.of.contamination.during.
cartridge.change.out.is.a.concern
•..Available.for.high.temperature.applications

CHEMFLOW .PE.&.XF . •...Purification.of.photoresists,.chemicals.
®
PTFE.Membrane./.High.Density. Cartridge 0.03,.0.05,. S XF and.etch.baths
Polyethylene.Structure 0.,.0.2,. •..Filtration.of.solvents,.cleaning.solutions

CLARIFLOW ® Cartridge. 0.02,.0.04,. •...Aqueous.based.chemicals;.recirculating.
Polyethersulfone.(PES).Membrane./. Mini-Capsule. 0.,.0.2,. S etch.baths;.UPW.systems
Mini.Polypropylene.Structure Mini-Cartridge 0.45,.0.65,.
0.8
PROFLOW.II ® Cartridge. •...Ultrapure.chemicals.and.gas..
PTFE.Membrane./.Polypropylene./. Mini-Capsule. 0.03,.0.05,. S processing;.photochemical.processing
Mini.Structure Mini-Cartridge 0.,.0.2,. •..Bulk.chemical.distribution
0.45,.
®
POLYFLOW .MEMBRANE . 0.04,.0.07,. •...Filtration.of.photochemicals.and..
Polypropylene.Nominal.Rated.. Cartridge 0.,.0.2 S ultrapure.chemicals
Membrane./.Polypropylene.Structure •..Gas.filtration

POLYFLOW ® Cartridge. 0.6,..2,.2.5,. •..DI.water.prefiltration
Polypropylene.Absolute.Rated.Depth. Mini-Capsule. 5,.0,.20,.40 •..Solvent.and.gas.prefiltration
Media./.Polypropylene.Structure Mini-Cartridge •..General.filtration
*Patent.pending

S SELECT Technology U Ultraclean Technology XF XF Technology XL XL Technology

S The.revolutionary.SELECT.technology.filter. U Ultraclean.technology.leads.the.microelec- XF XF.is.a.revolutionary.membrane..
cartridges.can.improve.and.lower.the.costs. tronics.industry.in.cleanliness..Ultraclean.is. technology..It.provides.superior.flow.over.
of.wafer.processing..Imagine:.up.to.80%. a.proprietary.process.applied.to.electronics. traditional.cartridges.by.utilizing.an.asym-
more.effective.filtration.area.–.with.twice. grade.products..It.provides.a.total.metals. metric.PTFE.membrane..XF.cartridges.
the.throughput..All.of.this.with.a.particle. extractables.level.of.<5ppb..Ultraclean’s. offer.up.to.three.times.the.flow.rate.and.
retention.of.>99.99%.from.a.product.that.is. low.level.of.metals.extractables.provides. throughput.at.lower.differential.pressure.
cleanroom.manufactured.and.tested. users.with.a.highly.consistent.manufactur-
ing.process.and.very.low.product.reject.
rates.
XL XL.technology.provides.maximum.flow.rate.
and.lifetime..It.combines.SELECT.technol-
ogy.with.a.larger.diameter.cartridge.(3.25").
for.the.highest.flows.in.the.industry.

Parker.Hannifin.Corporation.is.committed.to.provide.the.highest.quality.product.to.our.customers..To.this.end,.our.ISO.900:2000.
certified.Quality.System.ensures.that.this.occurs..At.Parker.Hannifin.Corporation,.we.do.our.best.to.resolve.all.quality.issues.in.a.quick.
and.timely.manner..In.addition,.we.strive.to.eliminate.problems.before.they.are.seen..By.taking.this.continuously.proactive.approach.to.
the.quality.of.all.of.our.products,.Parker.Hannifin.Corporation.has.the.best.product.on.the.market.at.all.times.

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