Page 7 - Parker - Microfiltration products for the microelectronics industry

Semiconductors:

The.filters.used.in.semiconduc-
tor.production.processes.need.
to.provide.the.lowest.possible. Pirahha Cleaning Sequence Rinse
levels.of.metals.extractables..
and.high.particle.retention.. Etch UPDI Water
efficiencies..However,.since.
these.processes.combine.the. H2O / HF
use.of.aggressive.chemicals.and. Rinse
high.process.temperatures,.we. HOT
have.developed.a.wide.range.. UPDI Water
of.fluoropolymer.filters.that.pos- Clean B
sess.high.chemical.and.thermal.
resistance.and.are.suited.for.all.
processes.in.the.manufacturing. Clean A H2SO4 / (NH4)2S2O8
of.semiconductors.

Our.fluoropolymer.filters.are.
available.with.the.following.. H2SO4 / H2O2
options:

•..XL:.New.standard.for.lifetime.
and.flow.rate
•..XF:.Dramatic.flow.rate..
advantages
•..SELECT.-.high.surface.area.
and.flow.rates
•..Ultraclean.-.<5ppb.metals..
extractables
•.Wet-packed
•.Capsules
•..High.particle.retention..
efficiencies

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