Page 18 - IchorValvesCatalog

MDV: Modular Diaphragm Valves

The Modular Diaphragm Valve (MDV) series includes ultrahigh purity versions, built to relevant SEMI

speci cations for outstanding reliability.

Features

• Seat design and dual-layer diaphragm promotes long cycle
life and reduced particle generation.
• Fully swept wetted path to minimize entrapment areas,
facilitate purging and maximize Cv while minimizing
internal volume.

• Pneumatic actuators to provide fast response
upon actuation.
• Manual and hybrid actuators to indicate visual
quarter-turn OPEN and CLOSED positions.

• Custom con gurations available upon request.

Materials of Construction

ID Component Material

1 Body 316L SST SEMI F20*

2 Seat PCTFE*

3 Diaphragm Elgiloy®

4 Button 316L SST

5 Bonnet 303 SST

6 Nut 303 SST

7 Actuator Anodized Aluminum

Wetted Components in Italics

* Additional material options available

PAGE 18 | Valves: MDV