Page 19 - IchorValvesCatalog

Speci cations

Designed Pressure Rating: Surface Roughness:

Pneumatic Working = Vacuum to 150 PSIG Standard: ≤16 Ra µ inch
¼ Turn Manual Working = Vacuum to 250 PSIG High Purity: 6-10 Ra µ inch

Proof = 1.5 x Working Ultrahigh Purity: ≤5 Ra µ inch

Burst = 4500 PSIG
Flow Coe cient:

Operating Temperature, Seat Material: Cv = 0.3

-40°F to 150°F (-40°C to 66°C), PCTFE

-40°F to 300°F (-40°C to 150°C), PEEK™ Pneumatic Actuator:
-15°F to 300°F (-10°C to 150°C), PFA, VESPEL® Actuation Pressure = 65-125 PSIG

1/8” -27 NPT or 1/8” Tube Integrated Fitting
Designed Leak Rates: as per SEMI F1

Inboard ≤10 atm cc He/sec Manual Actuator:
-9
Outboard ≤10 atm cc He/sec ¼ Turn Manual
-9
Across Seat ≤10 atm cc He/sec
-9

Disclaimer* Customer must ensure parts chosen are appropriate components for their safe performance, taking into

account material compatibility, operating conditions, proper installation, etc. of gas/ uid delivery system.
*For full disclaimer and warranty please see page 30

Testing Every Ichor Modular Diaphragm Valve is leak-checked in accordance with SEMI F1.

Valves: MDV | PAGE 19