Page 20 - IchorValvesCatalog
P. 20
Base Size, Seal Type and Ports
• Ichor’s MDV adheres to SEMI F102 and is compatible with C-Seal and W-Seal interfaces.
• Dimensions are in inches, for reference only and subject to change.
2-PORT 3-PORT
1.125” C-Seal
2-PORT 3-PORT
1.125” W-Seal
PAGE 20 | Valves: MDV
