Page 25 - IchorValvesCatalog

Speci cations

Designed Pressure Rating: Max Flow Coe cient | Turns to Open:
Working = Vacuum to 200 PSIG LF: 0.025 | 4

Burst = 3000 PSIG MF: 0.064 | 4
HF: 0.13 | 7

Operating Temperature:

-13°F to 392°F (-20°C to 200°C) Ori ce Size:
LF: 0.032 inch

Designed Leak Rates: as per SEMI F1 MF: 0.060 inch

Inboard ≤10 atm cc He/sec HF: 0.090 inch
-9

Surface Roughness:

Standard: ≤16 Ra µ inch

High Purity: 6-10 Ra µ inch

Ultrahigh Purity: ≤5 Ra µ inch

Disclaimer* Adjusting the shuto position from factory setting may result in valve damage.

Customer must ensure parts chosen are appropriate components for their safe performance, taking into

account material compatibility, operating conditions, proper installation, etc. of gas/ uid delivery system.
*For full disclaimer and warranty please see page 30

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MMV-18-1-2-MF-S-H MMV-24HF-1-2-HF-S-H MMV-18-2-2-LF-S-H MMV-24-2-2-MF-S-H
Valves: MMV | PAGE 25