Page 26 - IchorValvesCatalog
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Base Size, Seal Type and Ports



            •   Ichor’s MMV adheres to SEMI F102 and is compatible with C-Seal and W-Seal interfaces.

            •   Dimensions are in inches, for reference only and subject to change.







                                       1.12
                                                   4X M4
               1.125" C-SEAL, TYP.                 CLEARANCE            .305 TYP.
                                       .856        HOLES




                       1.12    .856




                                     2-PORT                   3-PORT



                                          1.125” C-Seal  |  2.02” Height  |  MMV-18-1-2-MF-S-H








                                       1.12
               1.125" W-SEAL, TYP.                  4X M4
                                       .788         CLEARANCE           .394 TYP.
                                                    HOLES



                        1.12   .856




                                     2-PORT                   3-PORT




                                          1.125” W-Seal  |  2.93” Height  |  MMV-18-2-2-LF-S-H





     PAGE 26     |     Valves: MMV
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