Page 26 - IchorValvesCatalog
P. 26
Base Size, Seal Type and Ports
• Ichor’s MMV adheres to SEMI F102 and is compatible with C-Seal and W-Seal interfaces.
• Dimensions are in inches, for reference only and subject to change.
1.12
4X M4
1.125" C-SEAL, TYP. CLEARANCE .305 TYP.
.856 HOLES
1.12 .856
2-PORT 3-PORT
1.125” C-Seal | 2.02” Height | MMV-18-1-2-MF-S-H
1.12
1.125" W-SEAL, TYP. 4X M4
.788 CLEARANCE .394 TYP.
HOLES
1.12 .856
2-PORT 3-PORT
1.125” W-Seal | 2.93” Height | MMV-18-2-2-LF-S-H
PAGE 26 | Valves: MMV
