Page 24 - IchorValvesCatalog

MMV: Modular Metering Valves

The Modular Metering Valve (MMV) series includes ultrahigh purity versions, built to relevant SEMI
speci cations for outstanding reliability.

Features

• Design promotes laminar ow.

• Diaphragm design to virtually eliminate particulate generation.

• Actuator isolated from process uids - no dynamic
seals, stems, needles or bellows in ow path.

• Easily adjustable and repeatable micrometer handle

for accurate ow control and serviceability.
• Incremented handle for easy adjustment and setting.

• Custom con gurations available upon request.

Materials of Construction

ID Component Material

1 Body 316L SST SEMI F20*

2 Diaphragm Elgiloy®

3 Button Torlon® 4301

4 Bonnet 316L SST

5 Nut 316L SST

6 Handle Anodized Aluminum
Internal
7 Brass
Bushings

Wetted Components in Italics
* Additional material options available

PAGE 24 | Valves: MMV