Page 5 - IchorValvesCatalog

Speci cations

Designed Pressure Rating: Surface Roughness:

Pneumatic Working = Vacuum to 150 PSIG Standard: ≤16 Ra µ inch

¼ Turn Manual Working = Vacuum to 250 PSIG High Purity: 6-10 Ra µ inch
Hybrid Working = Vacuum to 150 PSIG Ultrahigh Purity: ≤5 Ra µ inch

Proof = 1.5 x Working

Burst = 4500 PSIG Flow Coe cient:
Cv = 0.3
Operating Temperature, Seat Material:

-40°F to 150°F (-40°C to 66°C), PCTFE Pneumatic Actuator:
-40°F to 300°F (-40°C to 150°C), PEEK™ Actuation Pressure = 65-125 PSIG

-15°F to 300°F (-10°C to 150°C), PFA, VESPEL® 1/8” -27 NPT 1/8” Tube Integrated Fitting

M5 Pneumatic or 1/8” Tube Integrated Fitting
Designed Leak Rates: as per SEMI F1

Inboard ≤10 atm cc He/sec Manual and Hybrid Actuator:
-9
Outboard ≤10 atm cc He/sec ¼ Turn Manual
-9
Across Seat ≤10 atm cc He/sec
-9

Disclaimer* Customer must ensure parts chosen are appropriate components for their safe performance, taking into
account material compatibility, operating conditions, proper installation, etc. of gas/ uid delivery system.

*For full disclaimer and warranty please see page 30
Testing Every Ichor Conventional Diaphragm Valve is leak-checked in accordance with SEMI F1.

CDV4A-FSFS-02KSU CDV4A-TSTS-03KSU CDV4A-MSMS-06KSU CDV4A-MVMV-04KSU

Valves: CDV | PAGE 5