Page 7 - IchorValvesCatalog
P. 7
Connection Type
• Ichor Conventional Diaphragm Valve dimensions adhere to SEMI F36 and are compatible with Face
Seal and Tube Stub connection types.
• All size con gurations with ¼” connections have four M5 X 0.8 equally spaced threads on a 1.00”
diameter on the bottom face.
• Connection type options shown below are with 1/4” 2-Port-A Pneumatic N.C. Actuators.
• Dimensions are in inches, for reference only and subject to change.
wiv
eal
, S
MV
e S
eal
ac
= M
ale F
e S
emale F
= F
FS
FS = Female Face Seal, Swivelel MV = Male Face Seal
ac
MV
MV
-03KSU
MV
MV
CD V4A- FSFS -03KSU CDV4A-MVMV-03KSU
CD
CDV4A-FSFS-03KSU
V4A-
FSFS
ube S
tub
MS = M ale F ac e S eal , S wiv el TS = Tube Stub
T
TS
=
MS = Male Face Seal, Swivel
TS
V4A-
TS
CDV4A-MSMS-03KSU CD CD V4A- TS TS -03KSU
CDV4A-TSTS-03KSU
Valves: CDV | PAGE 7