Page 11 - IchorValvesCatalog
P. 11
Speci cations
Designed Pressure Rating: Designed Leak Rates: as per SEMI F1
Cracking Pressure ≤2 PSID Inboard ≤10 atm cc He/sec
-9
Maximum Working Pressure = 3000 PSIG Outboard ≤10 atm cc He/sec
-9
Maximum Back Pressure = 3000 PSIG
Burst = 12000 PSIG Surface Roughness:
Standard: ≤16 Ra µ inch
Operating Temperature, Seat Material: High Purity: 6-10 Ra µ inch
-20°F to 400°F (-28°C to 200°C) Ultrahigh Purity: ≤5 Ra µ inch
Disclaimer* Customer must ensure parts chosen are appropriate components for their safe performance, taking into
account material compatibility, operating conditions, proper installation, etc. of gas/ uid delivery system.
*For full disclaimer and warranty please see page 30
Testing Every Ichor Check Valve is leak-checked in accordance with SEMI F1 requirements and cracking pressure
veri ed.
CCV-4-S-H GCV-4-1.20-S-H MCV-18-1-3-2-S-H MFCV-4-1.40-S-H TMCV-18-1-2-S-H
Valves: Check Valves | PAGE 11
