Page 12 - IchorValvesCatalog

Base Size, Seal Type and Ports

• Ichor’s MCV and TMCV adhere to SEMI F102
and are compatible with C-Seal and
W-Seal interfaces. 3-PORT, CENTER 2-PORT, CENTER
• Dimensions are in inches, for reference only
and subject to change. 1.500” C-Seal | MCV 0.55” Height | TMCV 0.78” Height

1.125" C-SEAL, TYP. 1.12
4X M4
CLEARANCE
.856 HOLES

.305 TYP.
1.12 .856

3-PORT, CENTER 2-PORT, SIDE
3-PORT, CENTER 2-PORT, CENTER

1.125” C-Seal | MCV 0.55” Height | TMCV 0.76” Height 1.500” W-Seal | MCV 0.55” Height | TMCV 0.78” Height

3-PORT, CENTER 2-PORT, CENTER
3-PORT, CENTER 2-PORT, SIDE

1.125” W-Seal | MCV 0.55” Height | TMCV 0.76” Height 1.500” HF C-Seal | MCV 0.55” Height | TMCV 0.78” Height

PAGE 12 | Valves: Check Valves