Page 10 - IchorValvesCatalog

Check Valves

Ichor o ers a line of ultrahigh purity Check Valves: the Modular Check Valve (MCV), Top Mount Check

Valve (TMCV), Gland Check Valve (GCV), Conventional Check Valve (CCV) and Manifold Tube Check Valve
(MFCV) product lines. All valves are built to meet relevant SEMI speci cations to assure outstanding

reliability and value.

Features

• Short poppet travel for minimal back ow during shut-o

and length in gas system.
• Fully reversible design for MCV, MFCV and CCV part types.
• Side and center port poppet location for MCV part types.

• Standard surface mount interfaces to provide easy
mounting for MCV and TMCV part types.

• Compact check valve design incorporated into a standard
face seal gland, union face seal gland and 1/4” tube ends Conventional Check Valve
for GCV, CCV and MFCV.

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• Custom con gurations available upon request. .
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Materials of Construction
ID Component Material
Gland Check Valve Modular Check Valve
1 Body 316L SST SEMI F20*

2 Poppet 316L SST SEMI F20*

3 O-Ring Viton™

4 Spring Elgiloy®

5 Cap 316L SST SEMI F20*

Wetted Components in Italics
*Additional material options available

Manifold Tube Check Valve Top Mount Check Valve

PAGE 10 | Valves: Check Valves