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developed to be used in technical education institutions that will improve the quality of education in
the field of electrical and electronic engineering. Compared with other exposures system such as
filament and metal, the resulting UV LEDs system exposure is much cheaper, does not require
complex infrastructure to operate and offers full flexibility in exposure parameters [8]. The system is
portable, compact, offering low voltage DC operation and can be used in any suitable location.
Reduced system costs and complexity make UV LED photolithography as the perfect equipment for
microfibrating applications by producing patterns in varying distances according to the thickness of
the film used. This low cost UV LED exposure system has been realized and shows excellent results
especially for technical Education. Using UV LEDs the cost should be reduced 2 times of the current
cost compare to conversional equipment.

References
[1] https://www.hitlights.com/blog/led-introduction, LED introduction, Accessed on: 2017-06-23
[2] J.K. Kim, S.J. Paik, F. Herrault, and M.G. Allen, "UV-LED lithography for 3-D high aspect ratio
microstructure patterning," 14th Solid State Sensors, Actuators, and Microsystems Workshop, p 481-
484, June 2012.
[3] http://en.wikipedia.org/wiki/ Photolithography, Wikipedia, the free encyclopedia,
Photolithography, Accessed on: 2017-06-23
[4] Marc J. Madou, Fundamentals of Microfabrication and Nanotechnology, Third Edition, Volume
Two: Manufacturing Techniques for Microfabrication and Nanotechnology 1st Edition, CRC
Press,2011.
[5] J. Chatzakis, "A Printed Circuit Board Exposure Device Design for Course Projects using LEDs ",
Mathematical Models and Computational Methods, 2nd Edition, Proc. AMCSE 2015, MMMAS
2015, EAS 2015, ISBN: 978-1-61804-350-4, pp. 179-183
[6] http://www.nailsmag.com/article/93494/the-difference-between-led-and-uv-lam. The Difference
between LED and UV Lamps Accessed on: 2017-06-30
[7] Abd Rahman Tamuri et al , Ultravoilet (UV) Light Spectrum of fluorescent lamps, The
Proceedings of 8th SEATUC Symposium, 2014
[8] Murat Kaya Yapici and Ilyas Farhat, UV-LED exposure system for low-cost photolithography,
Proceedings of SPIE- The International Society for Optical Engineering, February 2014