Page 23 - HEMEXPO_BOOKLET

from few mbar up to 1000bar. Pressure sen-
sors can be delivered either as single dies or
in different type of packages targeting vari-
ous applications.
Flow Sensors: ESS has also developed and
offers a family of Industrial Flow Transmit-
ters and Digital Flow meters. Each system
integrates a silicon MEMS Flow Sensor along
with its driving and read-out electronic cir-
cuitry. Significant technological advances
are included in the design of the flow sens-
ing element packaging and housing.
Accelerometers: ESS has developed a fam-
ily of single axis MEMS accelerometers with
distinct ranges of ±2g, ±10g and ±20g. ESS’s
accelerometers can either be delivered as
single dies or co-packaged with electronics.
ESS based on the unique blend of highly ex-
perienced personnel and the accumulated
experience provides a range of custom-tai-
lored services supporting all development
levels of MEMS based sensors.
These services include:

• Development of custom made MEMS
sensor dies based on ESS fabrication
processes or other commercially
available processes
• Development of custom mixed
analog-digital ASICs for the signal
conditioning of MEMS sensors based on
commercially available CMOS processes
• Development of novel packaging
solutions tailored to the customer needs.
• Feasibility studies of new MEMS based
sensors
• Development of innovative MEMS
based sensor systems
• Prototyping
• Test and characterization
All services are based on a portfolio of differ-
ent validated methods, processes, designs
and technologies.

HEMEXPO Catalogue 2019 | 23