Page 16 - Vibrations 4
P. 16
MEMS
An accelerometer which you all own is called a Micro-
Mechanical-Electro Systems (MEMS).
Every smart-phone has a 3 axis MEMS to measure
acceleration.
MEMS uses the mechanical aspects of silicon.
You will observe the array of fingers in the mask.
As the device is moved the gap between the fingers
changes.
When this happens the capacitance changes which can be
measured.
Bandwidths beyond 10 kHz.
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