Page 3 - CHEMETALL-8461-Silicon-Carbide-Catalog_R3
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Silicon Carbide Wafer Preparation
Process Steps Chemetall Products
Crystal Ingot
Coolants — Sabre Microcut 28S, Sabre Microcut 707F, Tech Cool 3700
Crystal Trimming &
Diameter Grind Cleaners — Sabre Microclean 565, Sabre Microclean 227, Sabre Microclean 129,
Sabre Microclean 105
Coolants — Sabre Microcut 28S, Sabre Microcut 707F, Tech Cool 3700
Flat(s) Grinding Cleaners — Sabre Microclean 565, Sabre Microclean 227, Sabre Microclean 129,
Sabre Microclean 105
Diamond Powders — Sabre Micropowder D
Diamond Slurries — Sabre Microlap D
Wafer Slicing Vehicle — Sabre Microcut 61V
Cleaners — Sabre Microclean 565, Sabre Microclean 227, Sabre Microclean 129,
Sabre Microclean 105
Coolants — Sabre Microcut 28S, Sabre Microcut 707F, Tech Cool 3700
Edge Rounding Cleaners — Sabre Microclean 565, Sabre Microclean 227, Sabre Microclean 129,
Sabre Microclean 105
Diamond Powders — Sabre Micropowder D
Diamond Slurries — Sabre Microlap D
Lapping & Polishing Vehicle — Sabre Microcut 61V
Cleaners — Sabre Microclean 565, Sabre Microclean 227, Sabre Microclean 129,
Sabre Microclean 105
Polishing Pads — Sabre Pol P
Chemo-Mechanical CMP Slurry (Abrasive Free) — Sabre Micropol AF
Polishing (CMP) CMP Slurry — Sabre Micropol CS
Cleaning (Post-CMP) Sabre Microclean 565
Coolants — Sabre Microcut 28S, Sabre Microcut 707F, Tech Cool 3700
Fabricated Wafer Diamond Powders — Sabre Micropowder D
Thinning Diamond Slurries — Sabre Microlap D
(Backgrind/Lap/Polish) Vehicle — Sabre Microcut 61V
Polishing Pads — Sabre Pol P
& Dicing
Cleaners — Sabre Microclean 565, Sabre Microclean 227, Sabre Microclean 129,
Sabre Microclean 105
Additional product suite available for fabricated wafer device thinning (backgrind, lap, polish, dice) and cleaning.
Full product details available upon request. 3
