Page 20 - PlasmaPOD Catalog 2020
P. 20
o Internal Aluminium Cage assembly
o Accepts up to 25, vertical 6” wafers
4. Plasma Generation:
o RF generator: 300 W with automatic match unit
5. Gas line:
o 1 line (mass-flow controlled)
o 1 vent line
6. Vacuum Configuration:
o Process pressure measurement: capacitance manometer gauge
o Closed-loop pressure control system
7. Rear Services:
o Power: Single phase 110V or 230V / 50Hz rated at 16 Amps
o Water: 2 l/min connected to ¼” Swagelok fitting
o Compressed air: 80 psi
