Page 15 - PlasmaPOD Catalog 2020
P. 15
3. Electrode Detail:
o Substrate electrode: fixed height
o Stainless steel
o Internally heated: up to 400⁰C
o 240mm, (optional cover plates available for different sized wafers)
4. Plasma Generation:
o RF generator: 300 W with automatic match unit
o Integrated gas showerhead
5. Gas lines:
o External gas box with 3 gas lines (inc. MFC) as standard
o 1 vent line
6. Vacuum Configuration:
o Process pressure measurement: capacitive manometer and WRG
combo gauge
o Closed-loop pressure control system
o Close-coupled Turbo Pump (requires backing pump)
7. Rear Services:
o Power: Single phase 110V or 230V / 50Hz rated at 16 Amps
o Water: 2 l/min connected to ¼” Swagelok fitting
o Compressed air: 80 psi
