Page 14 - PlasmaPOD Catalog 2020
P. 14
1. User Interface:
o Touch screen interface
o Graphical representation of the full system for easy process
visualization
o Recipe feature providing bespoke process run
o Full control of each core component independently for process
development
o Full system configuration, including passwords and gas configuration
o Data logging: the ability to export data logs for viewing in Excel.
o Three built-in user accounts with varying degrees of access
o Full alarms and warnings set up to ensure safe operation of the tool
2. Chamber Detail:
o Internal dimensions: 280mm diameter x 105mm High
o Material:
o Stainless Steel base
o Aluminum chamber top
o Seal: O-ring
o Extensibility: single viewport
