Page 10 - PlasmaPOD Catalog 2020

3. Electrode Detail:

o Bottom electrode: fixed height
 Aluminum

 Water-cooled
 125mm, (optional cover plates available for different sized
wafers)

o Top electrode: grounded
 Aluminum
 Integrated gas showerhead

 Pneumatically raised

4. Plasma Generation:

o RF generator: 300 W with automatic match unit

5. Gas lines:

o 3 lines (mass-flow controlled)
o 1 vent line

6. Vacuum Configuration:

o Process pressure measurement: 1 Torr capacitance manometer
o Closed-loop pressure control system
o Close-coupled turbo-pump

7. Rear Services:

o Power: Single phase 110V or 230V / 50Hz rated at 16 Amps
o Water: 2 l/min connected to ¼” Swagelok fitting

o Compressed air: 80 psi