Page 13 - PlasmaPOD Catalog 2020
P. 13
Specification Highlights:
o 300W RF Generator with auto-matching
o Aluminum chamber; water-cooled
o 240mm electrode; Heated, stainless steel
o Internal PLC control system
o Touch-screen interface
o Capacitance manometer for pressure measurement
o Automatic closed-loop pressure control
o All controls are within the frame to minimize the footprint
o Built-in process recipe control and data logging
