Page 8 - PlasmaPOD Catalog 2020
P. 8
Specification Highlights:
o 300W RF Generator with auto-matching
o Aluminum chamber
o 125mm electrode; water-cooled
o Internal PLC control system
o Touch-screen interface
o Capacitance manometer gauge for pressure measurement
o Automatic closed-loop pressure control
o Close-coupled turbo (requires backing pump)
o All controls are within the frame to minimize the footprint
o Built-in process recipe control and data logging
