Page 3 - PlasmaPOD Catalog 2020
P. 3
Specification Highlights:
o 300W RF Generator with auto-matching
o Stainless Steel chamber with internal shields
o 160mm electrode with rotation (optional water cooling)
o Configurable RF/DC Magnetrons (see options)
o Internal PLC control system
o Touch-screen interface
o Capacitance manometer for pressure measurement
o WRG gauge for base pressure measurement
o Automatic closed-loop pressure control
o Close-coupled Turbo (requires backing pump)
o All control within the frame to minimize the footprint
o Built-in process recipe control and data logging
