Page 4 - PlasmaPOD Catalog 2020
P. 4
1. User Interface:
o Touch screen interface
o Graphical representation of a full system for easy process visualization
o Recipe feature providing bespoke process run
o Full control of each core component independently for process
development
o Full system configuration, including passwords and gas configuration
o Data logging facility; ability to export data logs for viewing in Excel.
o Three built-in user accounts with varying degrees of access
o Full alarms and warnings set up to ensure safe operation of the tool
2. Chamber Detail:
o Internal dimensions: 430mm Wide x 400mm High x 280mm Deep
o Material: Stainless Steel 316L Grade
o Seal: O-ring
o Single viewport
o Internal shields
