Page 6 - PlasmaPOD Catalog 2020
P. 6

8. Available Options:



               Gas lines:                             1 Additional gas line (inc. MFC)

               Backing pump:                          Dry Rotary (recommended 10m3/Hr or above)


                                                      3 x 1 inch plus fittings

               RF/DC Magnetron options                3 x 2 inch plus fittings

                                                      2 x 3 inch plus fittings

               Process Control                        Film thickness monitor
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