Page 18 - PlasmaPOD Catalog 2020
P. 18
Specification Highlights:
o 300W RF Generator with auto-matching
o Stainless Steel chamber with Aluminum Faraday Cage assembly
o 1 mass flow-controlled gas line
o Internal PLC control system
o Touch-screen interface
o Capacitance manometer for pressure measurement
o Automatic closed-loop pressure control
o All controls are within the frame to minimize the footprint
o Built-in process recipe control and data logging
