Page 2 - IchorTMSCatalog

TMS: Talon Modular

Integrated Gas Systems

Industries are choosing modular gas delivery systems for their obvious advantages over conventional

gas systems:

• Smaller size – allowing greater fl exibility in deployment and less space in manufacturing facilities.

• Shorter gas paths – reducing the time needed to purge gas lines.
• Greater confi gurability – providing customizable connections and easy, last-minute reconfi guration.

• Simpler maintenance – off ering quicker disassembly for maintenance and upgrades.
• Custom confi gurations and application support are available upon request.

It all adds up to greater effi ciency and boosted productivity.

Ichor recognized all of these advantages in 1996. We started building our TMS systems for integrators and
OEMs who also appreciated the system’s benefi ts and have been at the forefront ever since.

Ichor’s TMS line stands apart, thanks to our engineers’ long experience working with the leaders of the
semiconductor industry. Among the notable features:

• Single-sided serviceability: Each component can be accessed from a single side without removing
additional sections or assemblies. That means less downtime removing and replacing them.

• Less complexity: Built from a small family of unique parts and seals, Ichor’s systems allow users to keep
fewer items in inventory and still operate at maximum effi ciency.

• Integral heating: Early on, we recognized how critical heating confi gurations were to the design. None
of our systems require retrofi tting – they off er reliable heating throughout. It’s both cost-eff ective and

better suited for such advanced processing methods as atomic layer deposition (ALD).
• C-Seal and W-Seal compatibility: The TMS is a singular modular gas system architecture that works with

both C-Seal and W-Seal interfaces in 1.125” and 1.500” architectures.

PAGE 2 | TMS: Talon Modular Integrated Gas Systems