Page 7 - IchorTMSCatalog

Modular Seal Interfaces

• Ichor’s TMS adheres to SEMI F102 and is compatible with C-Seal and W-Seal interfaces.
• Please see table below for reference dimensions of compatible seal interfaces. Dimensions are in inches,
for reference only and subject to change.

NUMBER OF PORTS

BASE SIZE, 1-PORT 2-PORT 3-PORT
SEAL TYPE

1.125” C-SEAL, TYP. 1.12
.856
.305 TYP.
1.12 .856

1.125” C-Seal 4X M4 CLEARANCE HOLES

1.12
1.125” W-SEAL, TYP.
.856

.394 TYP.
1.12 .788

1.125” W-Seal 4X M4 CLEARANCE HOLES

1.50
1.500” C-SEAL, TYP. 1.188

1.50 1.188
.305 TYP.

1.500” C-Seal 4X M5 CLEARANCE HOLES

1.50
1.500” W-SEAL, TYP. 1.024

1.50 1.182

.512 TYP.
1.500” W-Seal 4X M5 CLEARANCE HOLES

1.50
1.500” HF C-SEAL, TYP. 1.188

1.50 1.188
.455 TYP.

1.500” HF C-Seal 4X M5 CLEARANCE HOLES

TMS: Talon Modular Integrated Gas Systems | PAGE 7