Page 5 - IchorTMSCatalog

TMS Panel Assembly:

TMS panels are easy for an operator to assemble, no matter what type of sealing interface is being
employed. The steps are straightforward:

1 Cradles are mounted to a base plate, using cradle bolt hardware.

Inserts are added, either as individual pieces or as weldments. Weldments include TMS
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manifold inserts as well as the many available face seal and weld fi ttings that Ichor off ers.

3 TMX C-Seals are placed on top, as well as any sandwich components and fl anges.

Finally, top mount components are bolted onto the cradles using component bolt hardware.
Ichor off ers a wide variety of valves with its Modular Diaphragm Valve and Modular Metering
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Valve product lines as well as a full selection of Surface Mount Accessories. Heaters may easily
be integrated into the panel assembly.

Specifi cations

Operating Temperature: Max Operation Pressure:

390°F (200°C) 4500 PSI (31 MPa)

Disclaimer* Customer must ensure parts chosen are appropriate components for their safe performance, taking into
account material compatibility, operating conditions, proper installation, etc. of gas/fl uid delivery system.

*For full disclaimer and warranty please see page 20

Testing Every Ichor wetted component is leak-checked across all welds in accordance with SEMI F1.

TMS: Talon Modular Integrated Gas Systems | PAGE 5