Page 6 - IchorTMSCatalog

TMS Flow Path

The Talon Modular Integrated Gas System allows for three basic fl ow paths between components. One
is isolated along sticks, a second is manifolding across sticks, and the third is a combination between the
two for three port components. The examples below show a typical C-Seal and W-Seal Top Mount
Component interfacing with the TMS architecture. Further fl ow path information is available upon
request. Contact Ichor or visit our website.

Top Mount Comp
Top Mount Comp Flow Into Component Component
Component From Manifold
Flow Out of Flow Out of
Flow Into Flow Out of Component Component
Component Component (Optional 3rd Port)
Insert Iso Insert Iso Insert Iso
(Optional 3rd Port)
Insert Iso
Cradle Insert Manifold Cradle Manifold

Typical TMS C-Seal Iso Typical TMS C-Seal Manifold

Top Mount Comp
Flow Into Component Component
From Manifold
Top Mount
Component Flow Out of
Component Flow Out of
Flow Out of Flow Into (Optional 3rd Port) Component
Component Component
Insert Iso
Insert Iso Insert Iso (Optional 3rd Port) Insert Iso

Cradle Insert Manifold Cradle

Typical TMS W-Seal Iso Typical TMS W-Seal Manifold

PAGE 6 | TMS: Talon Modular Integrated Gas Systems