Page 36 - february

PROFESSIONAL ADVICE

For coating the inner surface of a non-through- stainless cathode and KMRS with a
type hydraulic cylinder (with a bottom) made of a non- copper cathode (Figure 2a). Plasma
ferromagnetic material, a magnetron design with a devices can have independent
conical sputtered cathode surface was developed. The anodes or a generalized positive
conical shape of the cathode surface made it possible to electrode. A detailed description of
place the magnetron discharge anode on its small end. the construction is given in [3]. VDI
In the presence of a third electrode, it became possible and KMRS are independent plasma
to apply a negative bias to the workpiece, which is devices mounted on the axis of the
necessary for preliminary high-energy ion processing hydraulic cylinder in close proximity
and low-energy ion assistance. The structural diagram to each other. The surface to be
of a technological device with a conical cathode is shown treated moves relative to the plasma
in Fig. 2c, a detailed description is given in [2]. The assembly. The use of VDI made
large cathode diameter was 80 mm. The taper angle of it possible to use ionic treatment
the cathode is 45°. The conical shape in combination with metal ions of the substrate at
with the KMRS cylindrical magnetic system ensured a considerable distance from the
a high efficiency of the cathode material (up to cathode. In the design of the VDI,
80%). Discharge parameters of TsMRS in the coating a movable one-track magnetic
deposition mode at an argon pressure of about 1 Pa system was used, similar to the
- Uр = 490 V, Iр = 7.6 A. At a bias voltage on the magnetic system of the TsMRS. The
substrate of 60 V, an ion current of up to 2 A was arc discharge was initiated by short-
drawn onto the substrate. In the mode of preliminary term switching on of the magnetron
ion treatment, the TsMRS discharge current decreased discharge at the VDI cathode (for
to 1 A. At a bias voltage of 1500 V, the ion current to more details, see [3]). A distinctive
the substrate was 0.5 A. In order to intensify the ionic feature of the developed integrated
treatment, an integrated scheme of the technological device was also the simultaneous or
plasma device was developed, which includes two alternating operation of the VDI and
KMRS located oppositely on the axis of the hydraulic MRS at an argon pressure in the
cylinder. The structural diagram is shown in Fig. 2c, a vacuum chamber of 0.3 Pa, which is
detailed description is given in [2]. not typical for typical VDI operating
In the space bounded by the surface to be conditions.
treated and the conical sputtered surfaces of the An integrated technological
cathodes, the combined magnetic system of two device was developed and tested
TsMRS forms a closed configuration of the magnetic for coating the inner surface of a
field. Due to this, the density of the ion current to the larger diameter, which excluded the
substrate was increased. When using magnetrons with use of magnetron discharge plasma
different cathodes, it is possible to apply bimetallic or for organizing preliminary surface
composite coatings. For the application of a bimetallic preparation with high-energy ions
copper - stainless steel coating on the inner surface and low-energy ion assistance. In
of a part with a diameter of 250 mm, an integrated this case, it is effective to use a
technological device was developed, including a cylindrical MRS with an unbalanced
cylindrical vacuum arc evaporator (VDI) with a magnetic system. We are currently

36 Stanochniy park