Page 11 - Parker - High purity chemicals in electronic application

Absorber
Column
Acid
DI Water
Storage
Tank
Distillation
Distillation
Purier
Column
Hydrolyzer
Sulfur Trioxide
Vaporizer
Isopropyl Alcohol
Liquid
Sulfur Trioxide
Degasication
Storage Tank
Storage
Absorber
Condensor
UV
Sulfate
Esters
Sulfur Trioxide
Evaporator
Reverse
Osmosis
System 2
DI Water
Osmosis
Propene
System 1
Tank
Ion
Sulfuric
Ultapure
Ultra-Pure Water
Acid
Dilute HF
Storage
Tank
& Air
High-Purity Acids & Bases Oxidizer Sulfur Trioxide Water UHP Sulfuric Acid Pretreatment Dilution Reverse Introduction Exchange & Air Vent Filter Vent Filter Exchange Station EDI
DI Water
Ion
3
O2
Rich Air Recycle
Hydrogen Peroxide 2
Storage
Ultrapure DI Water Hydrogenator Schematic
Aquesous HF 4
Anhydrous HF Final
Solvent
Hydrouoric Acid
Hydrogen peroxide is made in a series of steps. Hydrogen 2 Purication
Distillation
A hydrocarbon-based “work-solution” is fed to
Concentrated
the hydrogenator along with a stream of hydrogen Selection Process
Aqueous HF
where hydrogenation occurs over a bed of Ni Liquid
or Pd catalysts. 1 Hydrogen Peroxide Extractor
The first filtration step is used to capture catalyst Anthraquinone
+ Solvent
particles from the hydrogenated fluid. 2 Applications
Column 2
Column 1
In the oxidizer, oxygen-rich air is introduced to the 2 Purication Purication Ultra-Pure
work solution to reverse the previous reaction. Water (UPW)
The resulting work-solution contains about 40%
H 2 O 2 by weight as it goes into the liquid extractor.
Water is fed into the extractor and since the H 2 O 2 High-Purity
is miscible in water while the solvent is not, the Solvents Isopropyl
Alcohol (IPA)
water-peroxide layer can be removed and sent to
the purification columns. Core Filter(s) Location Purpose Features Benefits Advantages High-Purity
In the purification columns, the water-peroxide Abso-Mate Acids & Bases
mixture is further concentrated and purified. For Poly-Mate Hydrouoric Acid
UHP hydrogen peroxide, multiple columns may Incoming raw Polypropylene depth Capture large particles Protection of
be used. Poly-Mate Plus 1 materials media in raw materials evaporator High-Purity
Polyflow Acids & Bases
Polyflow-G Sulfuric Acid
Chemflow-PE High-Purity
Chemflow-PE Select Stage/ PTFE membrane on Process particle Acids & Bases
2 pre-filtration/ either HDPE or PP Fine particle removal Hydrogen Peroxide
Proflow II-E blending support structure control
Proflow II-E Select
Clariflow-WE Provide consistent Services
Removal of particles in
Clariflow-E 3 DI water Hydrophilic PES UPW down to 0.02 microns source of UPW to
membrane
Clariflow-E Select liquid reactor
Chemflow-PE
Chemflow-PE Select PTFE membrane on Final filtration step Selection Matrix
Final
Proflow II-E 4 either HDPE, PP or Fine particle removal to help meet product
Package
Proflow II-E Select PFA support structure specifications
Fluoroflow Product Overview
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