Page 9 - Parker - High purity chemicals in electronic application

Absorber
Acid
DI Water
Tank
Distillation
Purier
Sulfur Trioxide
UHP Sulfuric Acid
Vaporizer
Isopropyl Alcohol
Liquid
Storage
Storage Tank
Sulfur Trioxide
Condensor
UV
Esters
Evaporator
Reverse
System 2
Reverse
Propene Absorber Sulfate Hydrolyzer DI Water Distillation Storage Sulfur Trioxide Sulfur Trioxide Column Column Dilution Osmosis Osmosis & Air Vent Filter Degasication Station
System 1
EDI
Pretreatment
High-Purity Acids & Bases Dilute HF Introduction Exchange
Tank
Ion
Sulfuric
Ultapure
Acid
Hydrofluoric Acid 5 Ultra-Pure Water Storage
Tank
& Air
Schematic Vent Filter
3
High-purity hydrofluoric (HF) acid begins with the DI Water Oxidizer Ion
mixing and chemical interaction of sulfuric acid and Water Exchange
Recycle
dry fluorspar (CF2). The result of mixing those in a 4 Rich Air Selection Process
O2
rotary kiln is HF gas. The HF gas is condensed then 2 2
distilled to form anhydrous hydrofluoric acid. 3
Storage Hydrogenator
In this diagram, the industrial anhydrous HF is delivered 3 Ultrapure DI Water
via tanker or pipeline to become ultra-pure HF Aquesous HF Applications
commonly used in semiconductor wafer etch and Anhydrous HF Final Hydrogen Solvent
Purication
clean processes. Parker domnick hunter membrane Distillation Ultra-Pure
filters with either HDPE or PFA structures may be 1 Concentrated Water (UPW)
used throughout the manufacturing process. Aqueous HF Hydrouoric Acid Liquid
Distillation is an important step in producing Hydrogen Peroxide High-Purity Extractor
ultra-pure hydrofluoric acid. The aggressive Anthraquinone Solvents Isopropyl
Alcohol (IPA)
nature of the acid combined with temperatures + Solvent
high enough to vaporize the HF make this a
Purication
High-Purity
challenging filter application. For that reason, Core Filter(s) Location Purpose Features Benefits Advantages Purication
Column 2
Column 1
only 100% fluoropolymer filters can be used. Chemflow-PE Acids & Bases
Hydrouoric Acid
Optional
More open ratings to
The HF vapor can pass through the PTFE membrane, Chemflow-PE Select 1 Incoming raw PTFE membrane on capture large particles Process particle
either HDPE or PFA
then re-condense in to a purer form with ultra low Fluoroflow materials support structure in raw materials control High-Purity
contaminants. As the ultra-pure concentrated HF Acids & Bases
exits the distillation process, a filtration step to Fluoroflow-HSA Sulfuric Acid
remove additional particles may be present. Clariflow-WE Provide consistent
Clariflow-E 2 DI water Hydrophilic PES Removal of particles in source of DIW to High-Purity
From here, the ultra-pure concentrated HF membrane UPW down to 0.02 microns hydrolyzer Acids & Bases
may be blended with ultra-pure water to various Clariflow-E Select Hydrogen Peroxide
desired concentrations. Chemflow-PE
Parker domnick hunter filters ensure process Chemflow-PE Select Stage/ PTFE membrane on Process particle
consistency and enable the HF manufacturer to Fluoroflow 3 pre-filtration/ either HDPE or PFA Fine particle removal control Services
support structure
blending
meet the final particle specification for their end
user customers. Fluoroflow-HSA
Fluoroflow High temp acid 100% fluoropolymer Temperature rating Coalesce water and
It’s important to note that while polypropylene 4 distillation construction up to 180C particle removal
filters, like Parker’s Proflow-II-E, could be used Fluoroflow-HSA Selection Matrix
in dilute HF, both HDPE and PFA are considered Chemflow-PE
to be more chemically robust and would typically Chemflow-PE Select PTFE membrane
be recommended. 5 Fine particle on either HDPE or Fine particle removal Final filtration step
Fluoroflow removal PP support to help meet final
Fluoroflow-HSA Product Overview
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