Page 7 - Parker - High purity chemicals in electronic application

Absorber
Acid
Storage
Tank
Distillation
Distillation
Purier
Column Column Dilution DI Water
Hydrolyzer Sulfur Trioxide
UHP Sulfuric Acid
Vaporizer
Isopropyl Alcohol Sulfur Trioxide & Air Vent Filter
Liquid
Sulfur Trioxide
Storage
Absorber Ultra-Pure Water (UPW) Storage Tank Degasication Introduction
Sulfate Condensor UV
Esters Sulfur Trioxide Station
Evaporator
Reverse Schematic
Osmosis 2
System 2
Ultra-Pure Water (UPW) is essential in the
*
Reverse
DI Water manufacturing processes of most chemicals, Osmosis
Propene chemical blends, and solvents. Chemical System 1 Selection Process
companies with high-purity chemical processes
use UPW in the manufacturing process or to Pretreatment EDI
control concentrations per their customer’s Tank 2
Sulfuric Ultapure specification. 3 Ion
Acid Dilute HF Exchange Applications
Converting typical city or lake water into UPW
requires several steps. Reverse osmosis (RO) is Ultra-Pure Water Storage Ultra-Pure
the first major step used to remove contaminants 1 Tank Water (UPW)
& Air
from the mains water. Parker domnick hunter Vent Filter
filters are used prior to the RO systems to protect High-Purity
the RO membrane from large particles.
DI Water Oxidizer 3 Ion Solvents Isopropyl
Water
Ion exchange converts the post-RO water to UPW Exchange Alcohol (IPA)
O2
water with a combination of cation and anion Recycle
Rich Air
resins used to remove positive and negative ions. 4 High-Purity
Filters are used to remove any particles that Acids & Bases
Storage Hydrogenator Hydrouoric Acid
Ultrapure DI Water could come off the ion exchange resin beds.
Aquesous HF Core Filter(s) Location Purpose Features Benefits Advantages
Anhydrous HF Distillation Hydrogen Final filters may be used for last chance particle Abso-Mate High-Purity
Final
Solvent
capture from the system to ensure the very best
Hydrouoric Acid Incoming mains Polypropylene Capture large particles Protection of reverse
Acids & Bases
Purication
Hydrogen Peroxide
Concentrated UPW quality. Poly-Mate Sulfuric Acid
Aqueous HF Post RO, most filters used are hydrophilic with Poly-Mate Plus 1 water & pre-RO depth media in raw materials osmosis system High-Purity
Liquid
Extractor
a polypropylene structure. It’s important to
Polyflow
Hydrogen Peroxide
Anthraquinone note that some companies may decide to use Polyflow-G Acids & Bases
all-fluoropolymer filters if they use an aggressive
+ Solvent
line sanitization method, like ozone, to kill any Proflow II-E
bacteria in the line. Purication 2 Storage tank Hydrophobic PTFE Venting of air Prevent unwanted
Purication
Column 2 Column 1 Proflow II-E Select air vent membrane pressure buildup Services
Clariflow-WE Post ion Hydrophilic PES Capture fine Protect downstream
*UPW refers to ultra-pure deionized water used Clariflow-E 3 exchange resin membrane particles coming off equipment and
in Microelectronics manufacturing capture (no wetting needed) ion exchange beds added process
Clariflow-E Select
Clariflow-E Final Hydrophilic PES Tightest particle removal Final filtration step Selection Matrix
4 membrane to help meet final
Clariflow-E Select filtration step (no wetting needed) to meet UPW standards particle specification
Product Overview
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