Page 10 - Parker - High purity chemicals in electronic application

Absorber
Column
High-Purity Acids & Bases Dilution DI Water Introduction
Acid
Storage 2
Sulfuric Acid Tank 3

Distillation
Schematic
Distillation Purier 4
Column
Sulfuric acid is highly used with either hydrogen
Hydrolyzer Sulfur Trioxide
UHP Sulfuric Acid
peroxide or ozonated UPW to create an intended Vaporizer
exothermic reaction. The added energy to this Liquid Selection Process
Isopropyl Alcohol
aggressive acid is ideal for removing hard-baked Sulfur Trioxide 4 Degasication
Storage Tank
Absorber photoresists and most organic contaminants Storage & Air Vent Filter
from the surface of silicon production wafers. Sulfur Trioxide
Sulfate Condensor UV
Esters Station
A common method of creating sulfuric acid 1 Sulfur Trioxide Applications
begins by mixing oleum and steam to produce Evaporator
Reverse
sulfur trioxide vapor. Filters may be used to 5 Osmosis Ultra-Pure
remove large particles and provide protection System 2 Water (UPW)
to the evaporator.
DI Water Core Filter(s) Location Purpose Features Benefits Reverse Advantages
Osmosis
Propene The SO3 is condensed then vaporized again just System 1 High-Purity
before entering a series of purifier columns. The Fluoroflow 1 Steam filter 100% fluoropolymer Temperature rating Protection of Solvents Isopropyl EDI
Alcohol (IPA)
up to 180C
number of purifiers will depend on the H2SO4 Fluoroflow-HSA construction Pretreatment absorption process
specification. Exiting the absorber column is pure Tank
Sulfuric concentrated sulfuric acid. Ultapure Fluoroflow-HSA High High-Purity Ion
Acid Dilute HF 2 temperature 100% fluoropolymer Temperature rating Protect and enhance Acids & Bases Exchange
Fluoroflow-Select
The pure concentrated acid is cooled and acid construction up to 180C distillation process Hydrouoric Acid
carefully diluted into usable concentrations. Fluoroflow-XL vaporization Ultra-Pure Water Storage
Tank
From there, the acid goes through a series of Clariflow-WE High-Purity
& Air
membrane filtration steps, each succeeding Hydrophilic PES Removal of particles in Provide consistent Acids & Bases
Vent Filter
step tighter than the previous until particle Clariflow-E 3 DI water membrane UPW down to 0.02 microns source of UPW Sulfuric Acid
specifications are met and the product is Clariflow-E Select
DI Water Oxidizer Ion
packaged for the end user. Chemflow-PE Water Exchange High-Purity
O2
Chemflow-PE Select Rich Air Recycle Acids & Bases
Hydrogen Peroxide
Proflow II-E Stage/ PTFE membrane on Process particle
Storage Proflow II-E Select 4 pre-filtration/ either HDPE,PFA or Fine particle removal control
Hydrogenator
Ultrapure DI Water blending PP support structure
Aquesous HF Fluoroflow-HSA Services
Anhydrous HF Distillation Hydrogen Purication
Final
Fluoroflow-Select
Solvent
Hydrogen Peroxide
Concentrated Chemflow-PE
Aqueous HF Hydrouoric Acid Chemflow-PE Select PTFE membrane on Final filtration step Selection Matrix
Liquid
Extractor
Proflow II-E
either HDPE, PFA or
product particle
Anthraquinone Proflow II-E Select 5 Final package PP support structure Fine particle removal to help meet final
+ Solvent specification
Fluoroflow-HSA
Fluoroflow-Select Purication Purication Product Overview
Column 2
Column 1
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